20 Synthesis, Optimization, and Characterization of AlN/TiN Thin Film Heterostructures

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Cite this

@article{04a83a56a61f484fb6b905d8a67424be,

title = "20 Synthesis, Optimization, and Characterization of AlN/TiN Thin Film Heterostructures",

author = "Waters, \{Cindy K\} and Sergey Yarmolenko and Jagannathan Sankar and Sudhir Neralla and Kelkar, \{Ajit D\}",

year = "2006",

language = "English",

journal = "{\textquotedblleft}No Title Available{\textquotedblright}",

}