An Economic Study on Chemical Mechanical Polishing of Silicon Wafers

Emmanuel A Baisie, Man Yang, Ravindra Kaware, Maria Hooker, Zhichao Li, Wangping Sun, XH Zhang

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	ASME 2009 International Manufacturing Science and Engineering Conference
Pages	691–697
State	Published - 2009

Cite this

@inproceedings{f5d596d3120c443c84ac15fb7f31856d,

title = "An Economic Study on Chemical Mechanical Polishing of Silicon Wafers",

author = "Baisie, \{Emmanuel A\} and Man Yang and Ravindra Kaware and Maria Hooker and Zhichao Li and Wangping Sun and XH Zhang",

year = "2009",

language = "English",

pages = "691–697",

booktitle = "ASME 2009 International Manufacturing Science and Engineering Conference",

}