An Economic Study on Chemical Mechanical Polishing of Silicon Wafers

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	ASME 2009 International Manufacturing Science and Engineering Conference
Pages	691–697
State	Published - 2009

Cite this

@inproceedings{1798643d946045d58a083d8bb92bc1bf,

title = "An Economic Study on Chemical Mechanical Polishing of Silicon Wafers",

author = "Baisie, \{Emmanuel A\} and Man Yang and Ravindra Kaware and Maria Hooker and ZC Li and Wangping Sun and XH Zhang",

year = "2009",

language = "English",

pages = "691–697",

booktitle = "ASME 2009 International Manufacturing Science and Engineering Conference",

}