| Original language | English |
|---|---|
| Pages (from-to) | 035002 (10 pp) |
| Journal | Semiconductor Science and Technology |
| Volume | 32 |
| State | Published - 2017 |
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Research output: Contribution to journal › Article
| Original language | English |
|---|---|
| Pages (from-to) | 035002 (10 pp) |
| Journal | Semiconductor Science and Technology |
| Volume | 32 |
| State | Published - 2017 |