TY - JOUR
T1 - Cellular toxicity assessment and environmental impact of pre-and post-CMP Nanoparticle Slurries
AU - Kosaraju, K.
AU - Crawford, S.
AU - Aravamudhan, Shyam
PY - 2015/1/1
Y1 - 2015/1/1
N2 - Nanoparticles (NPs) of silica, ceria and alumina are used as polishing slurries for Chemical Mechanical Planarization (CMP). However, the regulations for use and toxic levels of ENPs in slurries are yet to be established. NPs' reactivity along with their cellular toxicity and uptake are largely dependent on their physicochemical characteristics. This paper will also present the correlation between physicochemical properties of NPs and toxicity level so as to design and develop benign CMP ENPs. The current study will present a comparison between pre-and post-CMP slurries containing colloidal silica and ceria NPs. Post-CMP slurry waste were generated by polishing patterned test wafers of HDP oxide were comprehensively characterized using DLS, zeta potential, BET, XRD, FTIR, Raman, SEM and TEM. Next, slurries and waste were exposed to A549 lung epithetical cell lines for 6-48 hours to determine IC50 for cytotoxicity (cell viability and membrane integrity). It was observed that colloidal silica NPs in slurries showed dose-dependent cytotoxicity. Next, using label-free analytical technique, ICP spectroscopy, we observed that pre-and post-CMP ceria ENPs in slurries, exhibited dose-dependent uptake in A549 cells.
AB - Nanoparticles (NPs) of silica, ceria and alumina are used as polishing slurries for Chemical Mechanical Planarization (CMP). However, the regulations for use and toxic levels of ENPs in slurries are yet to be established. NPs' reactivity along with their cellular toxicity and uptake are largely dependent on their physicochemical characteristics. This paper will also present the correlation between physicochemical properties of NPs and toxicity level so as to design and develop benign CMP ENPs. The current study will present a comparison between pre-and post-CMP slurries containing colloidal silica and ceria NPs. Post-CMP slurry waste were generated by polishing patterned test wafers of HDP oxide were comprehensively characterized using DLS, zeta potential, BET, XRD, FTIR, Raman, SEM and TEM. Next, slurries and waste were exposed to A549 lung epithetical cell lines for 6-48 hours to determine IC50 for cytotoxicity (cell viability and membrane integrity). It was observed that colloidal silica NPs in slurries showed dose-dependent cytotoxicity. Next, using label-free analytical technique, ICP spectroscopy, we observed that pre-and post-CMP ceria ENPs in slurries, exhibited dose-dependent uptake in A549 cells.
UR - https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84959296800&origin=inward
UR - https://www.scopus.com/inward/citedby.uri?partnerID=HzOxMe3b&scp=84959296800&origin=inward
U2 - 10.1149/06940.0001ecst
DO - 10.1149/06940.0001ecst
M3 - Conference article
SN - 1938-5862
VL - 69
SP - 1
EP - 5
JO - ECS Transactions
JF - ECS Transactions
IS - 40
T2 - Symposium on Nanotechnology General Session - 228th ECS Meeting
Y2 - 11 October 2015 through 15 October 2015
ER -