Chemical Mechanical Planarization (CMP) of III-V Materials: Environmental fate, behavior and biological impact of pre- and post-CMP nanoparticle slurries

Steven Crawford; Karshak Kosaraju; Shyam Aravamudhan

Chemical Mechanical Planarization (CMP) of III-V Materials: Environmental fate, behavior and biological impact of pre- and post-CMP nanoparticle slurries

Steven Crawford, Karshak Kosaraju, Shyam Aravamudhan

Joint School of Nanoscience and Nanoengineering

Research output: Contribution to conference › Paper

Original language	English
State	Published - 2015
Event	Sustainable Nanotechnology Organization Conference - Duration: Jan 1 2015 → …

Conference

Conference	Sustainable Nanotechnology Organization Conference
Period	01/1/15 → …

Cite this

@conference{c64bfbb6d342483782876f371d5e3554,

title = "Chemical Mechanical Planarization (CMP) of III-V Materials: Environmental fate, behavior and biological impact of pre- and post-CMP nanoparticle slurries",

author = "Steven Crawford and Karshak Kosaraju and Shyam Aravamudhan",

year = "2015",

language = "English",

note = "Sustainable Nanotechnology Organization Conference ; Conference date: 01-01-2015",

}