Complementary metal oxide semiconductor compatible fabrication and characterization of parylene-C covered nanofluidic channels with integrated nanoelectrodes

Chih Kuan Tung, Robert Riehn, Robert H Austin

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)31101
JournalBiomicrofluidics
Volume3
Issue number3
StatePublished - 2009

Cite this