| Original language | English |
|---|---|
| Pages (from-to) | 31101 |
| Journal | Biomicrofluidics |
| Volume | 3 |
| Issue number | 3 |
| State | Published - 2009 |
Complementary metal oxide semiconductor compatible fabrication and characterization of parylene-C covered nanofluidic channels with integrated nanoelectrodes
Chih Kuan Tung, Robert Riehn, Robert H Austin
Research output: Contribution to journal › Article