Diamond disc pad conditioning in chemical mechanical polishing: a literature review of process modeling

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	ASME 2009 International Manufacturing Science and Engineering Conference
Pages	661–670
State	Published - 2009

Cite this

@inproceedings{0c758a24c0324ac0b59f2128f29931f2,

title = "Diamond disc pad conditioning in chemical mechanical polishing: a literature review of process modeling",

author = "Baisie, \{Emmanuel A\} and ZC Li and XH Zhang",

year = "2009",

language = "English",

pages = "661–670",

booktitle = "ASME 2009 International Manufacturing Science and Engineering Conference",

}