| Original language | English |
|---|---|
| Title of host publication | MEMS and Nanotechnology, Volume 8 |
| Publisher | Springer International Publishing |
| Pages | 75-83 |
| State | Published - 2015 |
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Research output: Chapter in Book/Report/Conference proceeding › Chapter
| Original language | English |
|---|---|
| Title of host publication | MEMS and Nanotechnology, Volume 8 |
| Publisher | Springer International Publishing |
| Pages | 75-83 |
| State | Published - 2015 |