Effects of--H and--OH Termination on Adhesion of Si--Si Contacts Examined Using Molecular Dynamics and Density Functional Theory

James Schall, Brian H Morrow, Robert W Carpick, Judith A Harrison

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)4601--4614
JournalLANGMUIR
Volume40
Issue number9
StatePublished - 2024

Cite this