Electrical and Optical Properties of TiN and TiNO Thin and Ultra-Thin Films

Manosi Roy; Kaushik Sarkar; Jacob Som; Mark Pfeifer; Valentin Craciun; David Schall; Shyam Aravamudhan; Frank Wise; Dhananjay Kumar

Electrical and Optical Properties of TiN and TiNO Thin and Ultra-Thin Films

Manosi Roy
, Kaushik Sarkar
, Jacob Som
, Mark Pfeifer
, Valentin Craciun
, David Schall
, Shyam Aravamudhan
, Frank Wise
, Dhananjay Kumar

Mechanical Engineering

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	4733-4742
Journal	ACS Applied Materials \& Interfaces
Volume	15
State	Published - 2023

Cite this

@article{333850cb24d6484faa2fc7ed326d532f,

title = "Electrical and Optical Properties of TiN and TiNO Thin and Ultra-Thin Films",

author = "Manosi Roy and Kaushik Sarkar and Jacob Som and Mark Pfeifer and Valentin Craciun and David Schall and Shyam Aravamudhan and Frank Wise and Dhananjay Kumar",

year = "2023",

language = "English",

volume = "15",

pages = "4733--4742",

journal = "ACS Applied Materials \textbackslash{}\& Interfaces",

}

TY - JOUR

T1 - Electrical and Optical Properties of TiN and TiNO Thin and Ultra-Thin Films

AU - Roy, Manosi

AU - Sarkar, Kaushik

AU - Som, Jacob

AU - Pfeifer, Mark

AU - Craciun, Valentin

AU - Schall, David

AU - Aravamudhan, Shyam

AU - Wise, Frank

AU - Kumar, Dhananjay

PY - 2023

Y1 - 2023

M3 - Article

VL - 15

SP - 4733

EP - 4742

JO - ACS Applied Materials \& Interfaces

JF - ACS Applied Materials \& Interfaces

ER -