Evaluating Stresses in SiO2 Thin Films Using Molecular Dynamics Simulations

  • Sachin Shendokar
  • , Nikhil Ingle
  • , Ram Mohan
  • , Shyam Aravamudhan

Research output: Chapter in Book/Report/Conference proceedingChapter

Original languageEnglish
Title of host publicationUnknown book
Pages230
StatePublished - 2023

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