Mapping Free-Carriers in Multijunction Silicon Nanowires Using Infrared Near-Field Optical Microscopy

  • Earl T. Ritchie
  • , David J. Hill
  • , Tucker M. Mastin
  • , Panfilo C. Deguzman
  • , James F. Cahoon
  • , Joanna M. Atkin

Research output: Contribution to journalArticlepeer-review

Abstract

We report the use of infrared (IR) scattering-type scanning near-field optical microscopy (s-SNOM) as a nondestructive method to map free-carriers in axially modulation-doped silicon nanowires (SiNWs) with nanoscale spatial resolution. Using this technique, we can detect local changes in the electrically active doping concentration based on the infrared free-carrier response in SiNWs grown using the vapor-liquid-solid (VLS) method. We demonstrate that IR s-SNOM is sensitive to both p-type and n-type free-carriers for carrier densities above ∼1 × 1019 cm-3. We also resolve subtle changes in local conductivity properties, which can be correlated with growth conditions and surface effects. The use of s-SNOM is especially valuable in low mobility materials such as boron-doped p-type SiNWs, where optimization of growth has been difficult to achieve due to the lack of information on dopant distribution and junction properties. s-SNOM can be widely employed for the nondestructive characterization of nanostructured material synthesis and local electronic properties without the need for contacts or inert atmosphere.
Original languageEnglish
Pages (from-to)6591-6597
Number of pages7
JournalNano Letters
Volume17
Issue number11
DOIs
StatePublished - Nov 8 2017

Keywords

  • VLS
  • doping
  • infrared s-SNOM
  • nanowire
  • near-field microscopy
  • silicon

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