Mechanical property and processing investigation of pulsed laser deposited Al2O3 and AIN-TiN thin films

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	2004 ASME International Mechanical Engineering Congress and Exposition, IMECE, November 13, 2004 - November 19, 2004
Pages	147-151
Volume	99
State	Published - 2004

Cite this

@inproceedings{d70cebec044443cc8ac2e1a486df9739,

title = "Mechanical property and processing investigation of pulsed laser deposited Al2O3 and AIN-TiN thin films",

author = "Xinyu Wang and Waters, \{Cynthia K\} and Sergey Yarmolenko and Dhananjay Kumar and Jagannathan Sankar",

year = "2004",

language = "English",

volume = "99",

pages = "147--151",

booktitle = "2004 ASME International Mechanical Engineering Congress and Exposition, IMECE, November 13, 2004 - November 19, 2004",

}

Mechanical property and processing investigation of pulsed laser deposited Al2O3 and AIN-TiN thin films. / Wang, Xinyu; Waters, Cynthia K; Yarmolenko, Sergey et al.
2004 ASME International Mechanical Engineering Congress and Exposition, IMECE, November 13, 2004 - November 19, 2004. Vol. 99 2004. p. 147-151.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Mechanical property and processing investigation of pulsed laser deposited Al2O3 and AIN-TiN thin films

AU - Wang, Xinyu

AU - Waters, Cynthia K

AU - Yarmolenko, Sergey

AU - Kumar, Dhananjay

AU - Sankar, Jagannathan

PY - 2004

Y1 - 2004

M3 - Conference contribution

VL - 99

SP - 147

EP - 151

BT - 2004 ASME International Mechanical Engineering Congress and Exposition, IMECE, November 13, 2004 - November 19, 2004

ER -