| Original language | English |
|---|---|
| Title of host publication | Nanoscience and Nanoengineering: Advances and Applications |
| Publisher | CRC Press |
| State | Published - 2014 |
Nano-Electro-Mechanical Systems (NEMS): Processes and Devices
- Jun Yan
- , Shyam Aravamudhan
- , Unknown First Name Unknown Last Name
Research output: Chapter in Book/Report/Conference proceeding › Chapter