Nucleation and growth of Yttria-stabilized zirconia thin films using combustion chemical vapor deposition

Zhigang Xu; Jagannathan Sankar; Sergey Yarmolenko; Qiuming Wei

Nucleation and growth of Yttria-stabilized zirconia thin films using combustion chemical vapor deposition

Zhigang Xu
, Jagannathan Sankar
, Sergey Yarmolenko
, Qiuming Wei

Research output: Contribution to journal › Conference article › peer-review

Abstract

Liquid fuel combustion chemical vapor deposition technique was successfully used for YSZ thin film processing. The nucleation rates were obtained for the samples processed at different temperatures and total-metal-concentrations in the liquid fuel. An optimum substrate temperature was found for the highest nucleation rate. The nucleation rate was increased with the total-metal-concentration. Structural evolution of the thin film in the early processing stage was studied with regard to the formation of nuclei, crystallites and final crystals on the films. The films were found to be affected by high temperature annealing. The crystals and the thin films were characterized with scanning electron microscopy.

Original language	English
Pages (from-to)	509-514
Number of pages	6
Journal	Materials Research Society Symposium Proceedings
Volume	756
State	Published - Jul 25 2003
Event	Solid State Ionics 2002 - Boston MA, United States Duration: Dec 2 2002 → Dec 5 2002

Cite this

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title = "Nucleation and growth of Yttria-stabilized zirconia thin films using combustion chemical vapor deposition",

abstract = "Liquid fuel combustion chemical vapor deposition technique was successfully used for YSZ thin film processing. The nucleation rates were obtained for the samples processed at different temperatures and total-metal-concentrations in the liquid fuel. An optimum substrate temperature was found for the highest nucleation rate. The nucleation rate was increased with the total-metal-concentration. Structural evolution of the thin film in the early processing stage was studied with regard to the formation of nuclei, crystallites and final crystals on the films. The films were found to be affected by high temperature annealing. The crystals and the thin films were characterized with scanning electron microscopy.",

author = "Zhigang Xu and Jagannathan Sankar and Sergey Yarmolenko and Qiuming Wei",

year = "2003",

month = jul,

day = "25",

language = "English",

volume = "756",

pages = "509--514",

journal = "Materials Research Society Symposium Proceedings",

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publisher = "Materials Research [email protected]",

note = "Solid State Ionics 2002 ; Conference date: 02-12-2002 Through 05-12-2002",

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TY - JOUR

T1 - Nucleation and growth of Yttria-stabilized zirconia thin films using combustion chemical vapor deposition

AU - Xu, Zhigang

AU - Sankar, Jagannathan

AU - Yarmolenko, Sergey

AU - Wei, Qiuming

PY - 2003/7/25

Y1 - 2003/7/25

N2 - Liquid fuel combustion chemical vapor deposition technique was successfully used for YSZ thin film processing. The nucleation rates were obtained for the samples processed at different temperatures and total-metal-concentrations in the liquid fuel. An optimum substrate temperature was found for the highest nucleation rate. The nucleation rate was increased with the total-metal-concentration. Structural evolution of the thin film in the early processing stage was studied with regard to the formation of nuclei, crystallites and final crystals on the films. The films were found to be affected by high temperature annealing. The crystals and the thin films were characterized with scanning electron microscopy.

AB - Liquid fuel combustion chemical vapor deposition technique was successfully used for YSZ thin film processing. The nucleation rates were obtained for the samples processed at different temperatures and total-metal-concentrations in the liquid fuel. An optimum substrate temperature was found for the highest nucleation rate. The nucleation rate was increased with the total-metal-concentration. Structural evolution of the thin film in the early processing stage was studied with regard to the formation of nuclei, crystallites and final crystals on the films. The films were found to be affected by high temperature annealing. The crystals and the thin films were characterized with scanning electron microscopy.

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UR - https://www.scopus.com/inward/citedby.uri?partnerID=HzOxMe3b&scp=0037811198&origin=inward

M3 - Conference article

SN - 0272-9172

VL - 756

SP - 509

EP - 514

JO - Materials Research Society Symposium Proceedings

JF - Materials Research Society Symposium Proceedings

T2 - Solid State Ionics 2002

Y2 - 2 December 2002 through 5 December 2002

ER -

Nucleation and growth of Yttria-stabilized zirconia thin films using combustion chemical vapor deposition

Abstract

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