Physicochemical Properties, Behavior and Toxicity Threshold Limit of Bound and Unbound Engineered Nanomaterials

Steven Crawford; Sahil Tahiliani; Shyam Aravamudhan

Physicochemical Properties, Behavior and Toxicity Threshold Limit of Bound and Unbound Engineered Nanomaterials

Steven Crawford, Sahil Tahiliani, Shyam Aravamudhan

Joint School of Nanoscience and Nanoengineering

Research output: Other contribution

Abstract

This report summarizes the studies performed to understand the physical and chemical characteristics of (a) composite filler material, namely boron nitride nanoparticles before and after thermal degradation and (b) pristine slurries and spent CMP waste after polishing of GaAs and HDP oxide films. In addition, this report also provides preliminary determination of half maximal inhibitory concentration (IC50) from the dose-response curves with both pre (pristine) and post (transformed) nanoparticles. Finally, Arsenic speciation results are presented from the analysis of GaAs CMP waste generated by polishing GaAs wafers using colloidal silica nanoparticle based slurry.

Original language	English
Volume	February
State	Published - 2017

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title = "Physicochemical Properties, Behavior and Toxicity Threshold Limit of Bound and Unbound Engineered Nanomaterials",

abstract = "This report summarizes the studies performed to understand the physical and chemical characteristics of (a) composite filler material, namely boron nitride nanoparticles before and after thermal degradation and (b) pristine slurries and spent CMP waste after polishing of GaAs and HDP oxide films. In addition, this report also provides preliminary determination of half maximal inhibitory concentration (IC50) from the dose-response curves with both pre (pristine) and post (transformed) nanoparticles. Finally, Arsenic speciation results are presented from the analysis of GaAs CMP waste generated by polishing GaAs wafers using colloidal silica nanoparticle based slurry.",

author = "Steven Crawford and Sahil Tahiliani and Shyam Aravamudhan",

year = "2017",

language = "English",

volume = "February",

type = "Other",

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TY - GEN

T1 - Physicochemical Properties, Behavior and Toxicity Threshold Limit of Bound and Unbound Engineered Nanomaterials

AU - Crawford, Steven

AU - Tahiliani, Sahil

AU - Aravamudhan, Shyam

PY - 2017

Y1 - 2017

N2 - This report summarizes the studies performed to understand the physical and chemical characteristics of (a) composite filler material, namely boron nitride nanoparticles before and after thermal degradation and (b) pristine slurries and spent CMP waste after polishing of GaAs and HDP oxide films. In addition, this report also provides preliminary determination of half maximal inhibitory concentration (IC50) from the dose-response curves with both pre (pristine) and post (transformed) nanoparticles. Finally, Arsenic speciation results are presented from the analysis of GaAs CMP waste generated by polishing GaAs wafers using colloidal silica nanoparticle based slurry.

AB - This report summarizes the studies performed to understand the physical and chemical characteristics of (a) composite filler material, namely boron nitride nanoparticles before and after thermal degradation and (b) pristine slurries and spent CMP waste after polishing of GaAs and HDP oxide films. In addition, this report also provides preliminary determination of half maximal inhibitory concentration (IC50) from the dose-response curves with both pre (pristine) and post (transformed) nanoparticles. Finally, Arsenic speciation results are presented from the analysis of GaAs CMP waste generated by polishing GaAs wafers using colloidal silica nanoparticle based slurry.

M3 - Other contribution

VL - February

ER -

Physicochemical Properties, Behavior and Toxicity Threshold Limit of Bound and Unbound Engineered Nanomaterials

Abstract

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