Pulsed Laser Deposition Parameter Optimization for Growth of Alumina (Al 2O 3) Thin Film on Silicon (100)

X Wang, Sergey Yarmolenko, Dhananjay Kumar, Zhigang Xu, Jagannathan Sankar

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Continuous Nanophase and Nanostructured Materials
Pages	577-582
Volume	788
State	Published - 2004

Cite this

@inproceedings{a5bf6b0feae74e848d9921a4a8f4678c,

title = "Pulsed Laser Deposition Parameter Optimization for Growth of Alumina (Al 2O 3) Thin Film on Silicon (100)",

author = "X Wang and Sergey Yarmolenko and Dhananjay Kumar and Zhigang Xu and Jagannathan Sankar",

year = "2004",

language = "English",

volume = "788",

pages = "577--582",

booktitle = "Continuous Nanophase and Nanostructured Materials",

}