Pulsed Laser Deposition Parameter Optimization for Growth of Alumina (Al 2O 3) Thin Film on Silicon (100)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Continuous Nanophase and Nanostructured Materials
Pages	577-582
Volume	788
State	Published - 2004

Cite this

@inproceedings{6e407c803c4c4a2694d30041c8f7390a,

title = "Pulsed Laser Deposition Parameter Optimization for Growth of Alumina (Al 2O 3) Thin Film on Silicon (100)",

author = "X Wang and Sergey Yarmolenko and Dhananjay Kumar and Zhigang Xu and Jagannathan Sankar",

year = "2004",

language = "English",

volume = "788",

pages = "577--582",

booktitle = "Continuous Nanophase and Nanostructured Materials",

}