Simulation of diamond disc conditioning in chemical mechanical polishing: effects of conditioning parameters on pad surface shape

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	ASME 2010 International Manufacturing Science and Engineering Conference
Pages	169–177
State	Published - 2010

Cite this

@inproceedings{09162a15baef4b868d92e2c53707f24a,

title = "Simulation of diamond disc conditioning in chemical mechanical polishing: effects of conditioning parameters on pad surface shape",

author = "Baisie, \{Emmanuel A\} and ZC Li and XH Zhang",

year = "2010",

language = "English",

pages = "169–177",

booktitle = "ASME 2010 International Manufacturing Science and Engineering Conference",

}