Simultaneous double side grinding of silicon wafers: a literature review

Zhichao Li, Zhijian J Pei, Graham R Fisher

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	1449–1458
Journal	International Journal of Machine Tools and Manufacture
Volume	46
Issue number	12
State	Published - 2006

Cite this

@article{590cdef886c64650a1630717e386a949,

title = "Simultaneous double side grinding of silicon wafers: a literature review",

author = "Zhichao Li and Pei, \{Zhijian J\} and Fisher, \{Graham R\}",

year = "2006",

language = "English",

volume = "46",

pages = "1449–1458",

journal = "International Journal of Machine Tools and Manufacture",

number = "12",

}