TY - JOUR
T1 - Simultaneous double side grinding of silicon wafers: a literature review
AU - Li, ZC
AU - Pei, Z. J.
AU - Fisher, Graham R.
PY - 2006/10/1
Y1 - 2006/10/1
N2 - Silicon wafers are the most widely used substrates for fabricating integrated circuits (ICs). The quality of ICs depends directly on the quality of silicon wafers. A series of processes are required to manufacture high quality silicon wafers. Simultaneous double side grinding (SDSG) is one of the processes to flatten the wire-sawn wafers. This paper reviews the literature on SDSG of silicon wafers, covering the history, machine development (including machine configuration, drive and support systems, and control system), and process modeling (including grinding marks and wafer shape). It also discusses some possible topics for future research. © 2005 Elsevier Ltd. All rights reserved.
AB - Silicon wafers are the most widely used substrates for fabricating integrated circuits (ICs). The quality of ICs depends directly on the quality of silicon wafers. A series of processes are required to manufacture high quality silicon wafers. Simultaneous double side grinding (SDSG) is one of the processes to flatten the wire-sawn wafers. This paper reviews the literature on SDSG of silicon wafers, covering the history, machine development (including machine configuration, drive and support systems, and control system), and process modeling (including grinding marks and wafer shape). It also discusses some possible topics for future research. © 2005 Elsevier Ltd. All rights reserved.
KW - Grinding
KW - Machining
KW - Modeling
KW - Semiconductor material
KW - Silicon wafer
KW - Simultaneous double side grinding
UR - https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=33746353107&origin=inward
UR - https://www.scopus.com/inward/citedby.uri?partnerID=HzOxMe3b&scp=33746353107&origin=inward
U2 - 10.1016/j.ijmachtools.2005.09.011
DO - 10.1016/j.ijmachtools.2005.09.011
M3 - Article
SN - 0890-6955
VL - 46
SP - 1449
EP - 1458
JO - International Journal of Machine Tools and Manufacture
JF - International Journal of Machine Tools and Manufacture
IS - 12-13
ER -