Substrate preparation by magnetron sputtering and CVD growth of carbon nanotube arrays

P. Salunke; Sergey Yarmolenko; S. Neralla; Jagannathan Sankar; K. Fischbach; G. Li; Yeo Heung Yun; M. Schulz; V. Shanov

Substrate preparation by magnetron sputtering and CVD growth of carbon nanotube arrays

P. Salunke, Sergey Yarmolenko, S. Neralla, Jagannathan Sankar, K. Fischbach, G. Li, Yeo Heung Yun, M. Schulz, V. Shanov

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Proceedings of the Asme International Mechanical Engineering Congress and Exposition 2007, Vol 13
Pages	181-186
State	Published - 2008

Cite this

@inproceedings{37a4c316683846bea4564ebf0db78bef,

title = "Substrate preparation by magnetron sputtering and CVD growth of carbon nanotube arrays",

author = "P. Salunke and Sergey Yarmolenko and S. Neralla and Jagannathan Sankar and K. Fischbach and G. Li and Yun, \{Yeo Heung\} and M. Schulz and V. Shanov",

year = "2008",

language = "English",

pages = "181--186",

booktitle = "Proceedings of the Asme International Mechanical Engineering Congress and Exposition 2007, Vol 13",

}

TY - GEN

T1 - Substrate preparation by magnetron sputtering and CVD growth of carbon nanotube arrays

AU - Salunke, P.

AU - Yarmolenko, Sergey

AU - Neralla, S.

AU - Sankar, Jagannathan

AU - Fischbach, K.

AU - Li, G.

AU - Yun, Yeo Heung

AU - Schulz, M.

AU - Shanov, V.

PY - 2008

Y1 - 2008

M3 - Conference contribution

SP - 181

EP - 186

BT - Proceedings of the Asme International Mechanical Engineering Congress and Exposition 2007, Vol 13

ER -