Substrate preparation by magnetron sputtering and CVD growth of carbon nanotube arrays

P. Salunke; Sergey Yarmolenko; S. Neralla; Jagannathan Sankar; K. Fischbach; G. Li; Yeo Heung Yun; M. Schulz; V. Shanov

Substrate preparation by magnetron sputtering and CVD growth of carbon nanotube arrays

P. Salunke
, Sergey Yarmolenko
, S. Neralla
, Jagannathan Sankar
, K. Fischbach
, G. Li
, Yeo Heung Yun
, M. Schulz
, V. Shanov

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Proceedings of the Asme International Mechanical Engineering Congress and Exposition 2007, Vol 13
Pages	181-186
State	Published - 2008

Cite this

@inproceedings{37c5547853a14f84a9b54b0daa309a14,

title = "Substrate preparation by magnetron sputtering and CVD growth of carbon nanotube arrays",

author = "P. Salunke and Sergey Yarmolenko and S. Neralla and Jagannathan Sankar and K. Fischbach and G. Li and Yun, \{Yeo Heung\} and M. Schulz and V. Shanov",

year = "2008",

language = "English",

pages = "181--186",

booktitle = "Proceedings of the Asme International Mechanical Engineering Congress and Exposition 2007, Vol 13",

}

TY - GEN

T1 - Substrate preparation by magnetron sputtering and CVD growth of carbon nanotube arrays

AU - Salunke, P.

AU - Yarmolenko, Sergey

AU - Neralla, S.

AU - Sankar, Jagannathan

AU - Fischbach, K.

AU - Li, G.

AU - Yun, Yeo Heung

AU - Schulz, M.

AU - Shanov, V.

PY - 2008

Y1 - 2008

M3 - Conference contribution

SP - 181

EP - 186

BT - Proceedings of the Asme International Mechanical Engineering Congress and Exposition 2007, Vol 13

ER -