Superior transport and optical properties of titanium oxynitride thin films: Liquid nitrogen assisted condensation of unwanted residual oxygen during film deposition

Abiodun Odusnaya; Madison Jordon; Mark Peifer; Dhananjay Kumar

Superior transport and optical properties of titanium oxynitride thin films: Liquid nitrogen assisted condensation of unwanted residual oxygen during film deposition

Abiodun Odusnaya, Madison Jordon, Mark Peifer, Dhananjay Kumar

Mechanical Engineering

Research output: Contribution to conference › Paper

Original language	English
State	Published - 2023
Event	APS March Meeting - Duration: Jan 1 2023 → …

Conference

Conference	APS March Meeting
Period	01/1/23 → …

Cite this

@conference{ce8b69ec2fdd496a918da25d3858af8a,

title = "Superior transport and optical properties of titanium oxynitride thin films: Liquid nitrogen assisted condensation of unwanted residual oxygen during film deposition",

author = "Abiodun Odusnaya and Madison Jordon and Mark Peifer and Dhananjay Kumar",

year = "2023",

language = "English",

note = "APS March Meeting ; Conference date: 01-01-2023",

}