Synthesis and mechanical properties of TiN-AIN thin film heterostructures

Cynthia K Waters, Dhananjay Kumar, Sergey Yarmolenko, Zhigang Xu, Jagannathan Sankar

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	37-42
Journal	Mechanical Properties Derived from Nanostructuring Materials
Volume	778
State	Published - 2003

Cite this

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title = "Synthesis and mechanical properties of TiN-AIN thin film heterostructures",

author = "Waters, \{Cynthia K\} and Dhananjay Kumar and Sergey Yarmolenko and Zhigang Xu and Jagannathan Sankar",

year = "2003",

language = "English",

volume = "778",

pages = "37--42",

journal = "Mechanical Properties Derived from Nanostructuring Materials",

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TY - JOUR

T1 - Synthesis and mechanical properties of TiN-AIN thin film heterostructures

AU - Waters, Cynthia K

AU - Kumar, Dhananjay

AU - Yarmolenko, Sergey

AU - Xu, Zhigang

AU - Sankar, Jagannathan

PY - 2003

Y1 - 2003

M3 - Article

VL - 778

SP - 37

EP - 42

JO - Mechanical Properties Derived from Nanostructuring Materials

JF - Mechanical Properties Derived from Nanostructuring Materials

ER -