Synthesis, optimization, and characterization of AlN/TiN thin film heterostructures

Research output: Book/Report › Book

Original language	English
Publisher	Nanoengineering of Structural, Functional and Smart Materials
Number of pages	56
State	Published - 2005

Cite this

TY - BOOK

T1 - Synthesis, optimization, and characterization of AlN/TiN thin film heterostructures

AU - Waters, C.K.

AU - Yarmolenko, Sergey

AU - Sankar, Jagannathan

AU - Neralla, S.

AU - Kelkar, A.D.

PY - 2005

Y1 - 2005

M3 - Book

BT - Synthesis, optimization, and characterization of AlN/TiN thin film heterostructures

PB - Nanoengineering of Structural, Functional and Smart Materials

ER -