The evolution of optical and electrical properties of low-k dielectrics under bias stress
- J. M. Atkin
- , E. Cartier
- , T. M. Shaw
- , J. R. Lloyd
- , Robert Laibowitz
- , T. F. Heinz
- Columbia University
- IBM Thomas J. Watson Research Center
- Columbia University
Research output: Contribution to journal › Article › peer-review
6
Scopus
citations