| Original language | English |
|---|---|
| State | Published - 2016 |
| Event | TECHCON 2016 - Duration: Jan 1 2016 → … |
Conference
| Conference | TECHCON 2016 |
|---|---|
| Period | 01/1/16 → … |
Understanding the Physicochemical Characteristics and Toxicity of Post-process Slurry from Chemical Mechanical Planarization of GaAs
Steven Crawford, Shyam Aravamudhan
Research output: Contribution to conference › Paper